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Introduction

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Introduction

Institute of Nanotechnology and Microsystems Engineering has been created since year 2002, based on the top high-end technology & facilities of NCKU micro-nano science and technology research center, Institute of Nanotechnology and Microsystems Engineering becomes the first institute with the combination of nanotechnology and Microsystems engineering. Institute of Nanotechnology and Microsystems Engineering consists of multidisciplinary knowledge such as mechanical engineering, electrical engineering, chemical engineering, material engineering, biology, chemistry, physic, photonic, optical electrical engineering, etc. When the materials size is within nanoscale, 1 x 10-9 m, appearance of some special characteristic and phenomenon such as quantum confinement, active side on interface, etc which cannot be explained with the traditional science theory are observed. Hence, the nanotechnology has played an extremely important role in the world technology development today. The multidisciplinary reorganization and research act as a driven force in creating a new industry or new high technology products. Furthermore, an unprecedented development of nanoscience and nanotechnology will enhance significantly human ability, social productivity, national productivity, economic growth and life quality. Microsystems engineering is a combination of technologies such as micro-sensor, micro-motor, optic-electrical & mechanical systems, microscopy, micro-tool and etc. This multidisciplinary technology has became a main developing target throughout the developed countries.

The Institute of Nanotechnology and Microsystems Engineering is focused on the development of education and research in the nanotechnology and also the Microsystems in order to develop this latest technology together with government strategies. Besides that, the institute of nanotechnology and Microsystems engineering also as an element of developing National cheng Kung University into a national research university. The facilities and teaching resource in Microsystems have been well-developed since the establishment of Southern Microsystems Center of Taiwan National Science Council. Based on the leading status of the Microsystems development, National Cheng Kung University had received a main subsidization from the Taiwan National Science Council and the Ministry of Education. Hence, the most complete Micro-Nano Science Research Center is established and this would able to support the education & research development of The Institute of Nanotechnology and Microsystems Engineering. So, both educations efficiency and research achievement are able to complementing one another hence National Cheng Kung University can achieve target as a top international University with remarkable academic achievement..

Institute of Nanotechnology and Microsystems Engineering consists of multidisciplinary knowledge such as mechanical engineering, electrical engineering, chemical engineering, material engineering, biology, chemistry, physic, photonic, optical electrical engineering, etc. And also included reorganization of multidisciplinary technologies such as RF, optical, and biomedical MEMS, micro/nano sensors and actuators, nano-materials and nano-fabrication technologies, nanodevices and nano-characterization, as well as biomedical applications of nanotechnology. Nowadays, the MEMS technology has been developed from a single mechanical unit or structure into a complicated optical-mechanical-electrical structure with multifunctional systems. It is a truly multidisciplinary course, besides the semiconductors fabrication related course such as electrical engineering and materials engineering, many micro-mechanical devices, systems and structural design and application tend to become more important. Furthermore, during the fabrication of micro- even nano-devices, some extraordinary phenomenon and effect which could not be able explained or ignored with the traditional theory occur, hence the multidisciplinary research study is very important in order to understand and explain those phenomenon especially in the MEMS development. Since the Microsystems is the key-technique within 21st century high-technology products series, it shows an attractive production value and also the large potential in the future market..


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